Automated Microscope

For high-resolution surface particle contamination mapping and imaging, the lab’s main workhorse is the Leica DM6000 M automated microscope customized with a 150x150 mm Marzhauser fully automated stage. The 50X lens are capable of resolving particles with a diameter of <0.3 microns. The 50XL (long-working) lens is also capable of measuring the wafer thickness to a resolution of ± 1.0 µm.

Leica microscope in Genesis lab